2026-05-13T06:44:27Z https://archive.materialscloud.org/oai2d

oai:materialscloud.org:granj-nhv94 2026-03-12T15:23:47Z openaire_data community-mcarchive

Turlo, Vladyslav Mackosz, Krzysztof Chudoba, Thomas Zawischa, Martin Hu, Yang Turlo, Vladyslav Michler, Johann Utke, Ivo 2026-03-12 <p>Mechanical properties of ultrathin coatings can deviate from bulk values due to growth-stage and interface effects. Elastic moduli of bulk amorphous alumina were calculated using a near-ab initio-accurate neural-network interatomic potential to provide a modeling benchmark for hydroxylated alumina coatings deposited by atomic layer deposition at 50 °C. Experimentally, elastic moduli were evaluated by both spherical nanoindentation and laser-induced surface acoustic wave spectroscopy (LiSAWS). For coatings thicker than 7 nm, both techniques indicated a weakly decreasing modulus from ~137 GPa to ~126 GPa (nanoindentation) and ~116 GPa to ~108 GPa (LiSAWS). These values are consistent with the simulated Young’s modulus.</p> application/zip text/plain https://doi.org/10.24435/materialscloud:rs-da oai:materialscloud.org:granj-nhv94 mcid:2026.60 eng Materials Cloud https://archive.materialscloud.org/communities/mcarchive https://doi.org/10.24435/materialscloud:c1-gb info:eu-repo/semantics/openAccess Creative Commons Attribution 4.0 International https://creativecommons.org/licenses/by/4.0/legalcode Spherical nanoindentation Laser-Induced Surface Acoustic Wave Spectroscopy (LiSAWS) Atomic Layer Deposition (ALD) ultrathin coatings Young's modulus yield strength hydroxylated alumina molecular dynamics foundation model MARVEL/P1 Modulus and yield strength determination at ultra-thin atomic layer deposited hydroxylated alumina coatings using spherical nanoindentation and surface acoustic waves info:eu-repo/semantics/other