Experimental_data.zip
Experimental_data
Nanoindentation
Nanoind_10nm_15mTorr.txt
4.6 kB
Nanoind_10nm_2mTorr.txt
4.5 kB
Nanoind_20nm_15mTorr.txt
4.7 kB
Nanoind_20nm_2mTorr.txt
4.7 kB
Nanoind_2nm_15mTorr.txt
4.7 kB
Nanoind_2nm_2mTorr.txt
4.8 kB
Nanoind_50nm_15mTorr.txt
4.4 kB
Nanoind_50nm_2mTorr.txt
4.6 kB
Nanoind_5nm_15mTorr.txt
4.7 kB
Nanoind_5nm_2mTorr.txt
4.7 kB
SiO2-post.txt
4.5 kB
SiO2-pre HE.txt
4.3 kB
Readme.txt
501 Bytes
XRD_Stress
10nm_15mTorr
Stress_CGM_Cu111_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.3 kB
Stress_CGM_Cu111_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23018_CuWnml_10Cu102Wx10_15mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.9 kB
Stress_CGM_W110_Dep23018_CuWnml_10Cu102Wx10_15mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.7 kB
Stress_CGM_W211_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.2 kB
Stress_CGM_W321_Dep23018_CuWnml_10Cu10Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
10nm_2mTorr
Stress_CGM_Cu111_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.1 kB
Stress_CGM_Cu111_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23017_CuWnml_10Cu102Wx10_2mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.7 kB
Stress_CGM_W110_Dep23017_CuWnml_10Cu102Wx10_2mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.6 kB
Stress_CGM_W211_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23017_CuWnml_10Cu10Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
20nm_15mTorr
Stress_CGM_Cu111_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
6.6 kB
Stress_CGM_Cu111_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
6.6 kB
Stress_CGM_Cu200_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.6 kB
Stress_CGM_W110_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.6 kB
Stress_CGM_W211_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23051_CuWnml_20Cu20Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
20nm_2mTorr
Stress_CGM_Cu111_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
6.8 kB
Stress_CGM_Cu111_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
6.6 kB
Stress_CGM_Cu200_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.9 kB
Stress_CGM_W110_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.7 kB
Stress_CGM_W211_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23046_CuWnml_20Cu20Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
2nm_15mTorr
Stress_CGM_Cu111_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.1 kB
Stress_CGM_Cu111_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.7 kB
Stress_CGM_W110_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.6 kB
Stress_CGM_W211_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.1 kB
Stress_CGM_W321_Dep23049_CuWnml_2Cu2Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
2nm_2mTorr
Stress_CGM_Cu111_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.2 kB
Stress_CGM_Cu111_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.8 kB
Stress_CGM_W110_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.7 kB
Stress_CGM_W211_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23044_CuWnml_2Cu2Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
50nm_15mTorr
Stress_CGM_Cu111_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
14.0 kB
Stress_CGM_Cu111_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
13.9 kB
Stress_CGM_Cu200_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi54e74deg_exported.xy
17.7 kB
Stress_CGM_Cu311_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
17.8 kB
Stress_CGM_Cu311_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
17.8 kB
Stress_CGM_W110_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi0deg_psi60deg_exported_0.xy
14.0 kB
Stress_CGM_W110_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi0deg_psi60deg_exported_1.xy
14.0 kB
Stress_CGM_W211_Dep23020_CuWnml_50Cu50Wx10_15mTorr_80W_psi30deg_exported.xy
17.8 kB
Stress_CGM_W321_Dep223020_CuWnml_50Cu50Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported.xy
32.7 kB
50nm_2mTorr
Stress_CGM_Cu111_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
13.9 kB
Stress_CGM_Cu111_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
14.0 kB
Stress_CGM_Cu200_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi54e74deg_exported.xy
17.7 kB
Stress_CGM_Cu311_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
18.0 kB
Stress_CGM_Cu311_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
18.0 kB
Stress_CGM_W110_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi0deg_psi60deg_exported_0.xy
13.8 kB
Stress_CGM_W110_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi0deg_psi60deg_exported_1.xy
14.0 kB
Stress_CGM_W211_Dep23019_CuWnml_50Cu50Wx10_2mTorr_80W_psi30deg_exported.xy
17.7 kB
Stress_CGM_W321_Dep223019_CuWnml_50Cu50Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
32.8 kB
Stress_CGM_W321_Dep223019_CuWnml_50Cu50Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
32.2 kB
Stress_CGM_W321_Dep223019_CuWnml_50Cu50Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
32.4 kB
5nm_15mTorr
Stress_CGM_Cu111_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.1 kB
Stress_CGM_Cu111_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.7 kB
Stress_CGM_W110_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.6 kB
Stress_CGM_W211_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23050_CuWnml_5Cu5Wx10_15mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
5nm_2mTorr
Stress_CGM_Cu111_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_0.xy
7.2 kB
Stress_CGM_Cu111_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi0deg_psi70e53deg_exported_1.xy
7.0 kB
Stress_CGM_Cu200_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi54e74deg_exported.xy
8.2 kB
Stress_CGM_Cu311_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_0.xy
8.2 kB
Stress_CGM_Cu311_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi29e5deg_psi79e98deg_exported_1.xy
8.2 kB
Stress_CGM_W110_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi0deg_psi60deg_exported_0.xy
6.9 kB
Stress_CGM_W110_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi0deg_psi60deg_exported_1.xy
6.7 kB
Stress_CGM_W211_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi30deg_exported.xy
8.2 kB
Stress_CGM_W321_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_0.xy
16.0 kB
Stress_CGM_W321_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_1.xy
16.0 kB
Stress_CGM_W321_Dep23045_CuWnml_5Cu5Wx10_2mTorr_80W_psi19deg_psi40e5deg_psi78e7deg_exported_2.xy
16.0 kB
XRD_T2T
T2T_10nm_15mTorr_exported.xy
157.5 kB
T2T_10nm_2mTorr_exported.xy
157.8 kB
T2T_20nm_15mTorr_exported.xy
158.0 kB
T2T_20nm_2mTorr_exported.xy
157.7 kB
T2T_2nm_15mTorr_exported.xy
157.2 kB
T2T_2nm_2mTorr_exported.xy
157.5 kB
T2T_50nm_15mTorr_exported.xy
158.4 kB
T2T_50nm_2mTorr_exported.xy
158.1 kB
T2T_5nm_15mTorr_exported.xy
157.4 kB
T2T_5nm_2mTorr_exported.xy
157.9 kB